Ownership Submission
FORM 4
Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).
UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934, Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(h) of the Investment Company Act of 1940
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(Print or Type Responses)
1. Name and Address of Reporting Person *
ROVATTI JOSEPH E
  2. Issuer Name and Ticker or Trading Symbol
ADE CORP [ADEX]
5. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
_____ Director _____ 10% Owner
__X__ Officer (give title below) _____ Other (specify below)
Controller
(Last)
(First)
(Middle)
C/O ADE CORPORATION, 80 WILSON WAY
3. Date of Earliest Transaction (Month/Day/Year)
10/06/2006
(Street)

WESTWOOD, MA 02090
4. If Amendment, Date Original Filed(Month/Day/Year)
6. Individual or Joint/Group Filing(Check Applicable Line)
_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person
(City)
(State)
(Zip)
Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1.Title of Security
(Instr. 3)
2. Transaction Date (Month/Day/Year) 2A. Deemed Execution Date, if any (Month/Day/Year) 3. Transaction Code
(Instr. 8)
4. Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4 and 5)
5. Amount of Securities Beneficially Owned Following Reported Transaction(s)
(Instr. 3 and 4)
6. Ownership Form: Direct (D) or Indirect (I)
(Instr. 4)
7. Nature of Indirect Beneficial Ownership
(Instr. 4)
Code V Amount (A) or (D) Price
Common Stock 10/06/2006   M   1,350 A $ 15.77 1,350 D  
Common Stock 10/06/2006   M   1,750 A $ 17.06 3,100 D  
Common Stock 10/06/2006   S   3,100 D $ 32.45 0 D  

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Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned
(e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security
(Instr. 3)
2. Conversion or Exercise Price of Derivative Security 3. Transaction Date (Month/Day/Year) 3A. Deemed Execution Date, if any (Month/Day/Year) 4. Transaction Code
(Instr. 8)
5. Number of Derivative Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4, and 5)
6. Date Exercisable and Expiration Date
(Month/Day/Year)
7. Title and Amount of Underlying Securities
(Instr. 3 and 4)
8. Price of Derivative Security
(Instr. 5)
9. Number of Derivative Securities Beneficially Owned Following Reported Transaction(s)
(Instr. 4)
10. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 4)
11. Nature of Indirect Beneficial Ownership
(Instr. 4)
Code V (A) (D) Date Exercisable Expiration Date Title Amount or Number of Shares
Employee Stock Option (right to buy) $ 15.77 10/06/2006   M     1,350   (1) 08/26/2013 Common Stock 1,350 $ 0 1,750 D  
Employee Stock Option (right to buy) $ 17.06 10/06/2006   M     1,750   (2) 11/17/2009 Common Stock 1,750 $ 0 1,350 D  
Employee Stock Option (right to buy) $ 15.77 10/11/2006   D     900   (3) 08/26/2013 Common Stock 900 (3) 0 D  

Reporting Owners

Reporting Owner Name / Address Relationships
 Director  10% Owner  Officer  Other
ROVATTI JOSEPH E
C/O ADE CORPORATION
80 WILSON WAY
WESTWOOD, MA 02090
      Controller  

Signatures

 /s/ Joseph E. Rovatti   10/13/2006
**Signature of Reporting Person Date

Explanation of Responses:

* If the form is filed by more than one reporting person, see Instruction 4(b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1) The option vested in equal installments quarterly over a five year period from August 2003 to August 2008.
(2) The option vested in equal installments quarterly over a five year period from November 1999 to November 2004.
(3) This option, which provided for vesting in equal installments quarterly over a five year period beginning in August 2003, was assumed by KLA-Tencor Corporation ("KLA-Tencor") in the merger between the issuer and KLA-Tencor and replaced with an option to purchase 629 shares of KLA-Tencor common stock for $22.54 per share.

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